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BS ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam >
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BS ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam, 2020
- National foreword
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Fundamentals
- 5 Devices and instruments [Go to Page]
- 6 Preparation of sample
- 7 Test method and procedure [Go to Page]
- 8 Data analysis
- 9 Test report
- Annex A (informative) Example of d-spacing, 2θ, χ value (tilt angle) and relative ideal intensity of the symmetric and asymmetric diffraction on the SiC single-crystal thin film (wafer)
- Annex B (informative) Determination of d-spacing, 2θ, χ value (tilt angle) and relative ideal intensity for the symmetric and asymmetric diffraction on the single-crystal thin film (wafer)
- Annex C (informative) Results of interlaboratory test
- Bibliography [Go to Page]