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  • ASTM
    E2246-11e1 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
    Edition: 2011
    $148.51
    Unlimited Users per year

Description of ASTM-E2246 2011

ASTM E2246 - 11e1

Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

Active Standard ASTM E2246 | Developed by Subcommittee: E08.05

Book of Standards Volume: 03.01




ASTM E2246

Significance and Use

5.1 Strain gradient values are an aid in the design and fabrication of MEMS devices.

1. Scope

1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope. Measurements from cantilevers that are touching the underlying layer are not accepted.

1.2 This test method uses a non-contact optical interferometric microscope with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

E2244 Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer

E2245 Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer

E2444 Terminology Relating to Measurements Taken on Thin, Reflecting Films

E2530 Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps

SEMI Standard

MS2 Test Method for Step Height Measurements of Thin Films

Keywords

cantilevers; combined standard uncertainty; fixed-fixed beams; interferometry; length measurements; microelectromechanical systems; MEMS; polysilicon; residual strain; round robin; stiction; strain gradient; test structure;


ICS Code

ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)


DOI: 10.1520/E2246

ASTM International is a member of CrossRef.

ASTM E2246

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About ASTM

ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide.
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