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  • ASTM
    F1404-92(2007) Test Method for Crystallographic Perfection of Gallium Arsenide by Molten Potassium Hydroxide (KOH) Etch Technique
    Edition: 2007
    $103.58
    Unlimited Users per year

Description of ASTM-F1404 2007

ASTM F1404-92-Reapproved2007

Withdrawn Standard: Test Method for Crystallographic Perfection of Gallium Arsenide by Molten Potassium Hydroxide (KOH) Etch Technique (Withdrawn 2016)




ASTM F1404

Scope

1.1 This test method is used to determine whether an ingot or wafer of gallium arsenide is monocrystalline and, if so, to measure the etch pit density and to judge the nature of crystal imperfections. To the extent possible, it follows the corresponding test method for silicon, Test Method F 47. Test Method F 47 also presents the definition of many crystallographic terms, applicable to this test method.

1.2 This procedure is suitable for gallium arsenide crystals with etch pit densities between 0 and 200 000/cm2.

1.3 Gallium arsenide, either doped or undoped, and with various electrical properties, may be evaluated by this test method. The front surface normal direction of the sample must be parallel to the <001> within ± 5° and must be suitably prepared by polishing or etching, or both. Unremoved processing damage may lead to etch pits, obscuring the quality of the bulk crystal.

1.4 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 8.

Keywords

crystal perfection; etch pit density; gallium arsenide; potassium hydroxide etch; semiconductor; single crystal; Contamination semiconductors; Crystal lattice structure; Defects semiconductors; Density electronic applications; Etching (materials/process); Etch pit density (EPD); Gallium arsenide; Impurities electronic materials/applications; KOH etch pits; Microscopic examination electronic materials; Molten KOH etch technique; Monocrystalline perfection


ICS Code

ICS Number Code 29.045 (Semiconducting materials)


DOI: 10.1520/F1404-92R07

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About ASTM

ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide.
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