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  • ASTM
    F1527-00 Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon
    Edition: 2000
    $113.57
    Unlimited Users per year

Description of ASTM-F1527 2000

ASTM F1527-00

Historical Standard: Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon




ASTM F1527

Scope

1.1 This guide covers the application of Standard Reference Materials (SRMs ) for resistivity measurements on silicon wafers. Specifically, this guide covers the use of these SRMs for preparing resistivity reference wafers and for ensuring the quality of the instrumentation used for preparing them.

1.2 This guide has not been evaluated for application to electronic materials other than silicon.

1.3 The guide covers the selection of materials for resistivity reference wafers, procedures for preparing and calibrating resistivity reference wafers, and use of resistivity reference wafers in qualifying, calibrating, and controlling various types of resistivity instrumentation.

1.4 The guide provides criteria for selection of instruments for determining the resistivity of silicon resistivity reference materials, procedures for maintaining such instruments in statistical quality control, and training requirements for operators engaged in making and using resistivity reference wafers.

1.5 Appendixes are included that cover (1) suggested control charting procedures for organizations that do not already have such procedures in place, and (2) errors in resistivity determination that result from uncertainties in wafer diameter, wafer thickness, and probe-tip spacing.

1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


Keywords

Calibration-semiconductor analysis instrumentation; Control chart; Eddy current gage; Four-point probe method; Mercury probe; Probe methods-four-point probe; Probe methods-spreading resistance probe; Reference materials (RM); Resistance (electrical)-semiconductors; Resistivity reference wafer; Sheet resistance; Silicon semiconductors; Silicon semiconductors-slices/wafers; SPC; Spreading resistance probe; Standard reference materials (SRM); silicon standard reference materials (SRM)/reference wafers, for; calibration/control of instruments for measuring resistivity of silicon


ICS Code

ICS Number Code 29.045 (Semiconducting materials)


DOI: 10.1520/F1527-00

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About ASTM

ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide.
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