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Description of ASTM-F2074 2000ASTM F2074-00Withdrawn Standard: Standard Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers (Withdrawn 2003)ASTM F2074Scope This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials that contain flats or notches on the periphery. It was developed for use with silicon wafers with standard diameter and flat positions as given in SEMI Specifications M1. 1.2 It may be applied to other semiconductor wafers if the flat locations are properly taken into account. 1.3 Wafers of any size can be measured provided that suitable test jigs and instruments are available. 1.4 Roundness of wafers cannot be determined from measurements made solely at the positions defined in this guide. No information is provided concerning the diameter of the wafer at points other than those measured. Keywords silicon; diameter; semiconducting materials; silicon wafers ICS Code ICS Number Code 29.045 (Semiconducting materials) DOI: 10.1520/F2074-00 This book also exists in the following packages...Subscription InformationMADCAD.com ASTM Standards subscriptions are annual and access is unlimited concurrency based (number of people that can access the subscription at any given time) from single office location. For pricing on multiple office location ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
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About ASTMASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide. |
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