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Description of ASTM-F815 1993ASTM F815-88-e1-Reapproved1993Withdrawn Standard: Test Method for Detection of Epitaxial Spikes (Withdrawn 1999)ASTM F815Scope 1.1 This test method covers the detection of epitaxial spikes on silicon wafers. It is applicable to any wafer diameter or surface orientation. 1.2 This test method is a pass or fail test for the presence of spikes on a wafer. If there are relatively few spikes and they are not close together the test method can also be used to count spikes. 1.3 For purposes of this test method, a detectable spike is one with a nominal height of 4 [mu]m or more. 1.4 This test method does not have the ability to measure spike heights. 1.5 This test method is ordinarily nondestructive but its use may require subsequent cleaning of the tested wafers. 1.6 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Keywords Epitaxial spikes; Nondestructive evaluation (NDE)-semiconductors; Pass-fail test; Visual examination-electronic components/devices; epitaxial spike detection on silicon wafers, pass-fail test,; Silicon-semiconductor applications; wafers-epitaxial spike detection, test ICS Code ICS Number Code 31.080.30 (Transistors) DOI: This book also exists in the following packages...Subscription InformationMADCAD.com ASTM Standards subscriptions are annual and access is unlimited concurrency based (number of people that can access the subscription at any given time) from single office location. For pricing on multiple office location ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
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About ASTMASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide. |
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