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  • BSI
    20/30400316 DC BS ISO 23216. Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
    Edition: 2020
    $44.66
    / user per year

Description of 20/30400316 DC 2020

This International Standard specifies spectroscopic ellipsometry (SE) for determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.

Amorphous carbon films may be deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. Amorphous carbon films have an amorphous structure, containing both sp2 and sp3 bonded carbon, and contain in some cases also hydrogen. There is graphite-like carbon as well as polymer-like, glass-like and diamond-like carbon films. Carbon films modified with metals, silicon and amorphous carbon films that have a gradient of composition/property in the thickness are not included. Paints and Varnishes are not included.

As amorphous carbon films show a huge diversity of structure and properties, it is indispensable to select the appropriate type of amorphous carbon film to exploit their excellent properties in practical use. Therefore, carbon films are characterized by spectroscopic ellipsometry under reasonable conditions. This enables classification of amorphous carbon films on silicon wafers within the n-k plane acting as process fingerprint.



Standard Number20/30400316 DC
TitleBS ISO 23216. Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
StatusDefinitive
Publication Date2020-05-20
Identical National Standard OfISO/DIS 23216
DescriptorsCarbon, Properties, Films (states of matter), Tests, Testing
ICS25.220.99 Other treatments and coatings
CommitteeSTI/33
PublisherBSI
Pages15

About BSI

BSI Group, also known as the British Standards Institution is the national standards body of the United Kingdom. BSI produces technical standards on a wide range of products and services and also supplies certification and standards-related services to businesses.
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