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  • BSI
    BS EN ISO 14644-10:2022 - TC Tracked Changes. Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination
    Edition: 2024
    $611.49
    / user per year

Description of BS EN ISO 14644-10:2022 - TC 2024

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

Standard NumberBS EN ISO 14644-10:2022 - TC
TitleTracked Changes. Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination
StatusDefinitive
Publication Date2024-01-04
DescriptorsSurfaces, Environmental cleanliness, Classification systems, Chemical cleaning, Controlled-atmosphere rooms, Concentration (chemical)
ICS13.040.35 Cleanrooms and associated controlled environments
CommitteeLBI/30
ISBN978 0 539 29992 2
PublisherBSI
Pages92

About BSI

BSI Group, also known as the British Standards Institution is the national standards body of the United Kingdom. BSI produces technical standards on a wide range of products and services and also supplies certification and standards-related services to businesses.
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