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  • BSI
    BS IEC 62047-31:2019 Semiconductor devices. Micro-electromechanical devices - Four-point bending test method for interfacial adhesion energy of layered MEMS materials
    Edition: 2019
    $313.97
    / user per year

Description of BS IEC 62047-31:2019 2019

IEC 62047-31:2019 (E) specifies a four-point bending test method for measuring interfacial adhesion energy of the weakest interface in the layered micro-electromechanical systems (MEMS) based on the concept of fracture mechanics. In a variety of MEMS devices, there are many layered material interfaces, and their adhesion energies are critical to the reliability of the MEMS devices. The four-point bending test utilizes a pure bending moment applied to a test piece of layered MEMS device, and the interfacial adhesion energy is measured from the critical bending moment for the steady state cracking in the weakest interface. This test method applies to MEMS devices with thin film layers deposited on semiconductor substrates. The total thickness of the thin film layers should be 100 times less than the thickness of a supporting substrate (typically a silicon wafer piece).

Standard NumberBS IEC 62047-31:2019
TitleSemiconductor devices. Micro-electromechanical devices - Four-point bending test method for interfacial adhesion energy of layered MEMS materials
StatusDefinitive
Publication Date2019-04-17
Identical National Standard OfIEC 62047-31 Ed.1.0, ERROR
DescriptorsCD-ROM, Data layout, Data transfer, Digital signals, Recording characteristics, Optical properties of materials, Coding (data conversion), Information exchange, Recording tracks, Data transmission, Error correction, Data processing, Environment (working), Read-only storage, Dimensions, Data media, Computer storage devices, Data recording, Optical disks, Storage, Testing conditions, Optical recording, Defects
ICS31.080.99 Other semiconductor devices
CommitteeEPL/47
ISBN978 0 580 96660 6
PublisherBSI
Pages16

About BSI

BSI Group, also known as the British Standards Institution is the national standards body of the United Kingdom. BSI produces technical standards on a wide range of products and services and also supplies certification and standards-related services to businesses.
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