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BS ISO 23420:2021 Microbeam analysis. Analytical electron microscopy. Method for the determination of energy resolution for electron energy loss spectrum analysis, 2021
- National foreword
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Symbols and abbreviated terms
- 5 Definition of the energy resolution
- 6 Reference materials and energy determination [Go to Page]
- 6.1 General
- 6.2 Materials selection for energy scale calibration
- 6.3 Binding energy measurement of graphite in the XPS
- 7 Measurement procedure and energy resolution determination [Go to Page]
- 7.1 General
- 7.2 Predetermination of binding energy [Go to Page]
- 7.2.1 Obtain graphite and the other reference sample
- 7.2.2 Measure C1s of graphite by using the XPS
- 7.3 Setup of the S/TEM and the EELS, and sample setting
- 7.4 First energy step, δE1, calibration [Go to Page]
- 7.4.1 EELS acquisition set-up
- 7.4.2 Determining the EELS first energy step, δE1
- 7.4.3 Acquisition of carbon K-edge EEL spectrum
- 7.4.4 Calculate calibrated energy step δE1C
- 7.5 Measurement of peak close to the zero-loss peak, ECZLP, for the other reference sample using energy step δE1 [Go to Page]
- 7.5.1 EEL spectrum acquisition of the second reference sample using energy step δE1
- 7.5.2 Obtain the value for CH2 between the zero-loss peak and the peak ECZLP
- 7.5.3 Calculate the peak ECZLP energy
- 7.6 Second energy step, δE2, calibration [Go to Page]
- 7.6.1 Determining the EELS second energy step, δE2
- 7.6.2 Acquire ECZLP EEL spectrum
- 7.6.3 Obtain the value for CH3 between the zero-loss peak and peak ECZLP
- 7.6.4 Calculate calibrated energy step δE2C
- 7.7 Determining the calibrated EEL spectrometer energy resolution, ΔE [Go to Page]
- 7.7.1 Acquisition of a ZLP EEL spectrum
- 7.7.2 Obtain the value for CH4 for the zero-loss peak
- 7.7.3 Calculate EEL spectrometer energy resolution, ΔE
- 7.8 Record items
- 8 Uncertainty for the measurement result of energy resolution
- Annex A (informative) Example of measurement procedure for energy resolution determination
- Annex B (informative) Correspondence between energy values of XPS C1s and EELS carbon K edge
- Bibliography [Go to Page]
