MADCAD.com - The Cloud-Based Reference Library

Not a subscriber? Register for a trial account.

Username:
Password:

Incorrect username/password.

Already a subscriber?

MADCAD.com Free Trial

Sign up for a 3 day free trial to explore the MADCAD.com interface, PLUS access the
2009 International Building Code to see how it all works.

If you like to setup a quick demo, let us know at support@madcad.com
or +1 800.798.9296 and we will be happy to schedule a webinar for you.

Email *
Password *
Confirm *
First Name *
Last Name *
Title
Company Name *
Company Size *
Industry *
Address *
Address 2
City *
State *	Zip *
Country *
Phone *
How did you hear about MADCAD.com? *

⨯To continue with accurate pricing,
please select your company type below:

Large goverment organizations

Large multi-national corporation (more than $5B annual revenue)

None of the above

Your company has a special pricing case for IEEE.
For pricing, please contact us by filling out the form.

Full name*
Email*
Phone
Your selection

⨯We need your input!

Are you a code official in a jurisdiction with less than 300,000 population?

Yes No

This item is only available for the code officials of jurisdictions less then 300K population.

If you do not meet the criteria item will be removed and you will be able to continue shopping other items.

⨯ We need your input!

Your company has a special pricing case for ASME.
Please make sure the information you provide below is accurate.

Company Industry
Number Of Employees
Revenue

Pricing for the ASME publications in the store is for a 1-4 employee company in Construction Industry with revenue under $500,000.
If correct company info does not match what is publicly available info we will suspend the access and contact you for correction.
Please call 1-800-798-9296 if you have any questions.
If your company has more than 5,000 employee or more than 500 mil revenue please email us at info@madcad.com to receive a special quote, use "ASME Quote" on the subject line.

Search book title

Search book content

Clear all filters Advanced Search Basic Search

Download File

eLibrary > ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems >

ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems, 2022

Expand All

TOC Search:

ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems, 2022

CONTENTS
Foreword
ASME B5 COMMITTEE ROSTER
CORRESPONDENCE WITH THE B5 COMMITTEE
Section 1 Scope [Go to Page]
1-1 SCOPE
Section 2 References [Go to Page]
2-1 NORMATIVE REFERENCES
2-2 INFORMATIVE REFERENCES
Section 3 Nomenclature [Go to Page]
3-1 NOMENCLATURE [Go to Page]
3-1.1 General
3-1.2 Symbols and Units of Measure
3-1.3 Acronyms
Section 4 Definitions [Go to Page]
4-1 INTRODUCTION
4-2 TERMS AND DEFINITONS
Section 5 Measurement Points, Coordinate Systems, and System Positioning Errors [Go to Page]
5-1 INTRODUCTION
5-2 MEASUREMENT POINT
5-3 CARRIAGE AND BASE COORDINATE SYSTEMS
5-4 CARRIAGE ORIGIN POINT
5-5 SYSTEM POSITIONING ERROR MOTION NOMENCLATURE
5-6 MEASUREMENT POINT TRANSFORMATIONS
Section 6 Environmental Specifications [Go to Page]
6-1 GENERAL
6-2 TEMPERATURE [Go to Page]
6-2.1 General
6-2.2 Thermal Environment Guidelines
6-2.3 Time Variations
6-2.4 Thermal Radiant Energy
6-3 AIR HUMIDITY [Go to Page]
6-3.1 General
6-3.2 Responsibilities
6-3.3 Specifications
6-4 BAROMETRIC PRESSURE [Go to Page]
6-4.1 General
6-4.2 Responsibilities
6-4.3 Specifications
6-5 BASE VIBRATION [Go to Page]
6-5.1 General
6-5.2 Responsibilities
6-5.3 Base Vibrational Parameters
6-6 ELECTRICAL [Go to Page]
6-6.1 General
6-6.2 Responsibilities
6-6.3 Electrical Parameters
6-7 UTILITY AIR [Go to Page]
6-7.1 General
6-7.2 Responsibilities
6-7.3 Specifications
Section 7 Positioning Performance [Go to Page]
7-1 GENERAL
7-2 IN-POSITION JITTER TEST [Go to Page]
7-2.1 General
7-2.2 General Measurement Setup
7-2.3 Measurement Procedure
7-2.4 Data Analysis
7-2.5 Uncertainty Analysis
7-2.6 Presentation of Results
7-3 MOVE-AND-SETTLE TEST [Go to Page]
7-3.1 General
7-3.2 Measurement Setup
7-3.3 Measurement Procedure
7-3.4 Data Analysis
7-3.5 Test Uncertainty Analysis
7-3.6 Presentation of Results
7-4 INCREMENTAL STEP TEST AND MINIMUM INCREMENTAL MOTION TEST [Go to Page]
7-4.1 General
7-4.2 General Measurement Setup
7-4.3 Incremental Step Test
7-4.4 Incremental Step Reversal Error
7-4.5 Minimum Incremental Motion
7-4.6 Test Uncertainty Analysis
7-4.7 Presentation of Results
7-5 STATIC POSITIONING ACCURACY AND REPEATABILITY [Go to Page]
7-5.1 Modes of Operation
7-5.2 Measurement Setup
7-5.3 Measurement Procedure
7-5.4 Data Analysis
7-5.5 Calculation of the Static Positioning Error, Reversal Error, Repeatability and Accuracy
7-5.6 Stroke of Axis
7-5.7 Nomenclature for Performance Metrics Calculated With Corrected Data
7-5.8 Linearity and Hysteresis
7-5.9 Periodic Error of Linear Motion (Partial Travel)
7-5.10 Alternate Informative Methods
7-5.11 Presentation of Results
7-6 CONSTANT VELOCITY AND ACCELERATION TEST [Go to Page]
7-6.1 General
7-6.2 Method for Defining Measurement Targets
7-6.3 Measurement Setup
7-6.4 Measurement Procedure
7-6.5 Data Analysis
7-7 DYNAMIC POSITIONING TESTS [Go to Page]
7-7.1 General
7-7.2 Method for Defining Measurement Targets
7-7.3 Measurement Setup
7-7.4 Measurement Procedure
7-7.5 Data Analysis
7-7.6 Test Uncertainty Analysis
7-7.7 Presentation of Results
Section 8 Geometric Accuracy [Go to Page]
8-1 STRAIGHTNESS ERRORS [Go to Page]
8-1.1 General
8-1.2 Measurement Setup
8-1.3 Measurement Setup
8-1.4 Static Straightness Measurement Procedure
8-1.5 Static Straightness Data Analysis
8-1.6 Presentation of Static Results
8-1.7 Dynamic Straightness Measurement Procedure
8-1.8 Dynamic Straightness Data Analysis
8-1.9 Presentation of Dynamic Results
8-2 ANGULAR ERRORS [Go to Page]
8-2.1 General
8-2.2 Measurement Setup
8-2.3 Measurement Setup
8-2.4 Static Angular Measurement Procedure
8-2.5 Static Angle Data Analysis
8-2.6 Presentation of Static Results
8-2.7 Dynamic Angular Measurement Procedure
8-2.8 Dynamic Angle Data Analysis
8-2.9 Presentation of Dynamic Results
Section 9 Point Repeatability Test [Go to Page]
9-1 GENERAL
9-2 MEASUREMENT SETUP [Go to Page]
9-2.1 General Measurement Setup
9-2.2 Equipment
9-2.3 Functional Point(s), Target position(s), and Sensor Location
9-2.4 Setup Configuration
9-2.5 Measurement Approach Direction(s)
9-2.6 Minimum Displacement
9-2.7 Axial Sensor — Special Cases
9-3 MEASUREMENT PROCEDURE [Go to Page]
9-3.1 General Measurement Procedure
9-3.2 Number of Data Points and Sampling Rate
9-3.3 Data Collection Timing
9-4 DATA ANALYSIS
9-5 TEST UNCERTAINTY ANALYSIS
9-6 PRESENTATION OF RESULTS
Section 10 Servo Characterization [Go to Page]
10-1 GENERAL
10-2 TECHNICAL BACKGROUND [Go to Page]
10-2.1 Signals and Systems
10-2.2 Linearity and Time Invariance
10-2.3 Frequency Response
10-2.4 Inputs and Outputs
10-2.5 Categorizing Frequency Responses
10-3 FREQUENCY RESPONSE MEASUREMENTS [Go to Page]
10-3.1 Equipment
10-3.2 Loop Transmission Measurement Procedure
10-4 STABILITY METRICS
10-5 PRESENTATION OF RESULTS
10-6 SUMMARY
Section 11 Test Equipment and Instrumentation [Go to Page]
11-1 GENERAL
11-2 EXISTING REFERENCES AND STANDARDS
11-3 LINEAR POSITION [Go to Page]
11-3.1 Laser Interferometers
11-3.2 Linear Encoders
11-3.3 Linear Variable Displacement Transformers
11-3.4 Capacitive Sensors
11-3.5 Eddy Current Sensors
11-4 ANGLE [Go to Page]
11-4.1 Laser Interferometers
11-4.2 Autocollimators
11-4.3 Electrolytic Inclinometers
11-4.4 Servo Tiltmeters
11-4.5 MEMS Inclinometer
11-4.6 Position Sensing Detector Sensor
11-5 TEMPERATURE
11-6 BAROMETRIC PRESSURE
11-7 HUMIDITY
11-8 REFRACTIVE INDEX OF AIR
11-9 VIBRATION
11-10 DATA ACQUISITION [Go to Page]
11-10.1 Filters
11-10.2 Triggers
11-11 FIXTURING
Section 12 Uncertainty [Go to Page]
12-1 GENERAL
12-2 RATED OPERATING CONDITIONS
12-3 TEST CONDITIONS
12-4 MEASURAND AND UNCERTAINTY
12-5 MEASUREMENT REPRODUCIBILITY
12-6 EXAMPLE SOURCES OF UNCERTAINTY [Go to Page]
12-6.1 Reference Artifact
12-6.2 Misalignment of Measuring System (Cosine Error)
12-6.3 Temperature
12-6.4 Other Properties of Air
12-6.5 Vibration
12-6.6 Resolution
12-6.7 Uncertainty of RMS Value
Figures [Go to Page]
Figure 5-2-1 Measurement Point (MP)
Figure 5-3-1 Right-Handed Coordinate System Showing Directionality of Motion
Figure 5-3-2 Motion of the Functional Point (FP) With Respect to the Frame Coordinate System (csF)
Figure 5-5-1 Error Motions of a Single-Axis Linear Positioning System Designed to Traverse Along the X-Axis
Figure 7-2.2.2-1 Example Measurement Setup for In-Position Jitter Test in the Z-Direction at Point (dx, dy, dz)
Figure 7-2.6-1 Example of an In-Position Jitter Test Report
Figure 7-3.4.2-1 Example Moving Average Error, Calculated With a Process Window Time of 50 ms
Figure 7-3.4.2-2 Example Moving Standard Deviation, Calculated With a Process Window Time of 50 ms
Figure 7-3.4.2-3 Example Moving Peak Error, Calculated With a Process Window Time of 50 ms
Figure 7-3.5-1 Moving Average Error for Multiple Move-and-Settle Tests
Figure 7-3.6-1 Example of a Move-and-Settle Test Report
Figure 7-4.3.1-1 Example Displacement Vs. Time Plot for an Incremental Step Test With a 2.5 nm Commanded Step Size
Figure 7-4.3.1-2 Illustration of Move-and-Settle Time, tms, and Average Time, tave
Figure 7-4.4-1 Successively Decreasing Steps Used to Measure the Incremental Step Reversal Error
Figure 7-4.7-1 Example of an Incremental Step Test and Minimum Incremental Motion Test Report
Figure 7-5.2.3-1 Illustration of Travel Range and Measurement Range
Figure 7-5.3-1 Example Test Cycle Having m = 10 Points Measured Bidirectionally 5 Times, 5 per Direction and Each Endpoint Measured Unidirectionally 5 Times
Figure 7-5.4.4-1 Abbe Error for Both Pitch Angle, αij, and Yaw Angle, βij, for the Case of Measuring With an Interferometer
Figure 7-5.4.5-1 Examples of Measurement Data With Different Normalizations
Figure 7-5.5-1 Example Mean Bidirectional Positioning Error and Calculation Results
Figure 7-5.8-1 Plot of Linearly Corrected (via Endpoint Linear Normalization) Positioning Deviations Illustrating the Calculation of Linearity of the Axis
Figure 7-5.9.5-1 Plot of Calculated Positioning Deviations Illustrating the Periodic Error P of a Linear Axis
Figure 7-5.10.1-1 Step Test Cycle
Figure 7-5.10.3-1 Example of Position Data Corrected for Drift
Figure 7-5.11-1 Example of a Static Positioning Error and Linearity Test Report
Figure 7-6.5.2-1 Example of a Velocity Profile for a Test Motion
Figure 7-6.5.2-2 Example of Velocity Settling for a Test Motion
Figure 7-6.5.3-1 Example of a Constant Velocity and Acceleration Test Report for a Single Motion
Figure 7-6.5.3-2 Example of Average Metrics for Constant Velocity and Acceleration Test Report
Figure 7-7.3.1-1 Laser Interferometer Example Setup
Figure 7-7.5.1-1 Linear Ramp Motion General Characteristics
Figure 7-7.5.2-1 Example Linear Ramp Motion and Dynamic Positioning Deviation for Three Control Configurations
Figure 7-7.5.2-2 Zoomed-In Portion of Example Dynamic Positioning Deviation for Three Control Configurations for Linear Ramp Target Motion
Figure 7-7.5.2-3 Zoomed-In Portion of Example Dynamic Positioning Deviation Near the Final Target Position After t = 0.2 s
Figure 7-7.5.3-1 Sinusoidal Motion General Characteristics
Figure 7-7.5.4-1 Example Sinusoidal Motion and Dynamic Positioning Deviation for Two Control Configurations
Figure 7-7.5.4-2 Zoomed-In Portion of Example Dynamic Positioning Deviation for Two Control Configurations for Sinusoidal Target Motion
Figure 7-7.5.4-3 Example Sinusoidal Target Velocity and Target Acceleration for Two Control Configurations
Figure 7-7.7.1-1 Example of a Dynamic Positioning Test Report for a Linear Ramp Motion
Figure 7-7.7.2-1 Example of a Dynamic Positioning Test Report for a Sinusoidal Motion
Figure 7-7.7.2-2 Example of a Dynamic Velocity Test Report for a Sinusoidal Motion
Figure 7-7.7.2-3 Example of a Dynamic Acceleration Test Report for a Sinusoidal Motion
Figure 8-1.1-1 Straightness Error Motions, EYX and EZX, of a Linear Positioning System Designed to Traverse in the X-Direction
Figure 8-1.2.2-1 Setups for Measuring Straightness Using a Displacement Sensor and a Straightedge With Either a Fixed-Sensor Measurement or a Moving-Sensor Measurement
Figure 8-1.2.2-2 Setup for Measuring Straightness Using a Straightness Interferometer With Either a Fixed-Sensor Measurement or a Moving-Sensor Measurement
Figure 8-1.6-1 Example of a Static Straightness Test Report
Figure 8-1.9-1 Example of a Dynamic Straightness Test Report
Figure 8-2.1-1 Angular Error Motions, EAX, EBX, and ECX, of a Linear Positioning System Designed to Traverse in the X-Direction
Figure 8-2.6-1 Example of a Static Angular Error Test Report
Figure 8-2.9-1 Example of a Dynamic Angular Error Report
Figure 9-2.3-1 The Four Possible Test Cases of the Point Repeatability Test Given the Options for Single or Multiple Functional Points and Target Positions
Figure 9-2.4-1 Setup Configuration — Three-Sensor Nest
Figure 9-2.4-2 Setup Configuration — Single Sensor
Figure 9-2.4-3 Setup Configuration —Two-Sensor Nest
Figure 9-6-1 Example of a Point Repeatability Test Report for a Linear Positioning System
Figure 10-2.3-1 Lumped-Parameter Model of a Mass-Spring-Damper System Driven by a Force
Figure 10-2.3-2 Frequency Response Plot for an Underdamped Mass-Spring-Damper System
Figure 10-2.5.1-1 Basic Control Scheme Used by Many Single-Axis Positioning Systems
Figure 10-3.2-1 Disturbance Signal, w, Injected Into a System Following the Control Algorithm but Before the Power Amplifier Stage
Figure 10-4-1 Examples of the Measures on a Typical Loop Transmission Plot
Figure 10-5-1 Example of a Measured Loop Transmission for a Linear Motion System
Figure 10-5-2 Corresponding Sensitivity Plot for a Measured Loop Transmission for a Linear Motion System
Figure 11-3.1-1 Generic Laser Interferometer Setup for Axial Position Measurement
Figure 11-3.2-1 Generic Linear Encoder Setup for Axial Position Measurement
Figure 11-3.3-1 LVDT Schematic for Axial Position Measurement
Figure 11-4.1-1 Alternate Laser Interferometer Setups for Pitch or Yaw Angular Displacement Measurement
Figure 11-4.2-1 Autocollimator Setup for Angular Displacement Measurement
Figure I-2-1 Relationship of Vectors Between Physically Related Points Under Consideration: oF (Reference Coordinate System), M and P (Carriage)
Figure I-2-2 Associated Coordinate Systems for Fixed Points oF, M, and P
Figure I-2-3 Separation of Related Position Vectors Into System Nominal Positioning (X→), Initial Offsets (MX→), and Displacement Error Vectors (EM→ and EP→) (Combining Positioning and Straightness Deviations)
Figure II-2.1-1 Schematics of Several Displacement Sensors With Capture Fixtures
Figure II-2.3.1-1 Setup for Measuring Influence of Laser Interferometer Optics
Figure II-2.3.2-1 Setup for Measuring Influence of Laser Interferometer System
Tables [Go to Page]
Table 7-3.4.3-1 Move-and-Settle Times for Various Metrics Using a Settling Criteria of 0.05 μm for a Process Window Time of 50 ms
Table 7-5.10.2-1 First 40 Position Values Based on a Sobol Sequence Calculation
Table 10-3.2-1 Dynamic Signal Analyzer Test Parameters to Be Specified
Table 10-5-1 Values to Accompany a Typical Servomechanism Characterization Test
Table 11-3-1 Typical Position Sensor Characteristics
Table 11-4-1 Typical Angle Sensor Characteristics
MANDATORY APPENDIX I MEASUREMENT POINT TO FUNCTIONAL POINT ERROR TRANSFORMATION [Go to Page]
I-1 GENERAL
I-2 DISPLACEMENT ERROR TRANSFORMATION (POSITION AND STRAIGHTNESS)
I-3 PROPAGATION OF ERROR UNCERTAINTY
MANDATORY APPENDIX II ISOLATED SENSOR CHECK [Go to Page]
II-1 GENERAL
II-2 MEASUREMENT SETUP [Go to Page]
II-2.1 Short-Range Displacement Sensors
II-2.2 Autocollimators
II-2.3 Laser Interferometry Systems
II-3 MEASUREMENT PROCEDURE
MANDATORY APPENDIX III SPECIFICATIONS FOR OPERATING CONDITIONS AND PERFORMANCE [Go to Page]
III-1 GENERAL
III-2 GENERAL SPECIFICATIONS FOR SINGLE-AXIS LINEAR POSITIONING SYSTEM
III-3 ENVIRONMENTAL SPECIFICATIONS FOR RATED OPERATING CONDITIONS [Go to Page]
III-3.1 Temperature
III-3.2 Ambient Air
III-3.3 Electrical (Per Each Electrical Supply)
III-3.4 Ambient Vibration
III-3.5 Utility Air (if Applicable)
III-4 SPECIFICATIONS FOR MACHINE PERFORMANCE [Go to Page]
III-4.1 General Test Conditions
III-4.2 In-Position Jitter Test (See Subsection 7-2)
III-4.3 Move and Settle Test (See Subsection 7-3)
III-4.4 Incremental Step Test and Minimum Incremental Motion Test (See Subsection 7-4)
III-4.5 Static Positioning Accuracy and Repeatability (See Subsection 7-5)
III-4.6 Constant Velocity and Acceleration Test (See Subsection 7-6)
III-4.7 Dynamic Positioning Accuracy Tests (See Subsection 7-7)
III-4.8 Straightness Errors (See Subsection 8-1)
III-4.9 Angular Errors (See Subsection 8-2)
III-4.10 Point Repeatability Test (See Section 9)
III-4.11 Servo Characterization (See Section 10) [Go to Page]

MADCAD.com Free Trial

Report To Us

Contact us for a custom quote

⨯To continue with accurate pricing,
please select your company type below:

⨯We need your input!

⨯ We need your input!

⨯We need your input!

⨯We need your input!

Cart Warning

ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems, 2022

MADCAD.com Free Trial

Report To Us

Contact us for a custom quote

⨯To continue with accurate pricing, please select your company type below:

⨯We need your input!

⨯ We need your input!

⨯We need your input!

⨯We need your input!

Cart Warning

ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems, 2022

⨯To continue with accurate pricing,
please select your company type below: