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  • ASTM
    F1188-00 Standard Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption
    Edition: 2000
    $103.58
    Unlimited Users per year

Description of ASTM-F1188 2000

ASTM F1188-00

Historical Standard: Standard Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption




ASTM F1188

Scope

1.1 This test method covers the determination of the interstitial oxygen content of single crystal silicon by infrared spectroscopy. This test method requires the use of an oxygen-free reference specimen and a set of calibration standards, such as those comprising NIST SRM 2551. It permits, but does not require, the use of a computerized spectrophotometer.

1.2 The useful range of oxygen concentration measurable by this test method is from 1 X 1016 atoms/cm3 to the maximum amount of interstitial oxygen soluble in silicon.

1.3 The oxygen concentration obtained using this test method assumes a linear relationship between the interstitial oxygen concentration and the absorption coefficient of the 1107 cm-1 band associated with interstitial oxygen in silicon.

1.4 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


Keywords

Infrared absorption; interstitial oxygen; oxygen; silicon


ICS Code

ICS Number Code 29.045 (Semiconducting materials)


DOI: 10.1520/F1188-00

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About ASTM

ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide.
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