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  • ASTM
    F1726-02 Standard Guide for Analyis of Crystallographic Perfection of Silicon Wafers (Withdrawn 2003)
    Edition: 2002
    $91.10
    Unlimited Users per year

Description of ASTM-F1726 2002

ASTM F1726-02

Withdrawn Standard: Standard Guide for Analyis of Crystallographic Perfection of Silicon Wafers (Withdrawn 2003)




ASTM F1726

Scope

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This guide covers the determination of the density of crystallographic defects in unpatterned polished and epitaxial silicon wafers. Epitaxial silicon wafers may exhibit dislocations, hillocks, shallow pits or epitaxial stacking faults, while polished wafers may exhibit several forms of crystallographic defects or surface damage. Use of this practice is based upon the application of several referenced standards in a prescribed sequence to reveal and count microscopic defects or structures.

1.2 Materials for which this practice is applicable may be defined by the limitations of the referenced documents.

1.2.1 This practice is suitable for use with epitaxial or polished wafers grown in either (111) or (100) direction and doped either p or n-type with resistivity greater than 0.0005 Ω-cm.

1.2.2 This practice is suitable for use with epitaxial wafers with layer thickness greater than 0.5 µm.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


Keywords

dislocation; epitaxy; grain boundaries; hillock; polycrystalline imperfections; preferential etch; shallow pit; silicon; slip; stacking fault


ICS Code

ICS Number Code 29.045 (Semiconducting materials)


DOI: 10.1520/F1726-02

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About ASTM

ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide.
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